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| Phosphorus oxychloride |
| Alias |
Fosforoxychlorid; Oxychlorid fosforecny; oxychloridfosforecny; Phosphoroxidchlorid; Phosphortrichloridoxid; Phosphorus chloride oxide (POCl3); Phosphorus oxytrichloride; Phosporus Oxychloride; phosphoric trichloride; Phosporus Oxychoride |
| CAS NO. |
10025-87-3 |
| Molecular Formula |
POCL3 |
| Molecular Weight |
153.33 |
| Main Content |
Phosphorus oxychloride |
| Physical Properties |
It is a colorless with irritant smell fuming liquid. Its relative density is 1.675, melting point is 2℃,boiling point is 105.3℃. It presents reddish yellow when it solubles in chlorine or Phosphorus pentachloride. When it is exposed to the damp air, it hydrolyzes into phosphoric acid and hydrogen chloride directly, and gives out white smoke. It disintegrates and gives out a large quantity of heat and hydrochloric acid gas when meet with water and alcohol. It has a sitimulation effect for eyes. And it is corrosive. |
| Toxic Protection |
The gas gives out by phosphorus oxychloride is harmfu,stimulating and corrosive. It can stimulate mucosa, which leads to eyes ache, dry cough and serious dyspnea.Later, it may occur bronchitis cardiac insufficiency and other symptoms. If one drop has been splashed into
eye mucous, the eye mucous will die and the vision will loss immediately. The hightest consistence is 0.05mg/m3. The operating personnel should wear protective equipment. The equipments which is used to produce phosphorus oxychloride has to be airtight. The staff should wear gas mask during the working period, and protect skin and eyes carefully. |
| Usage |
The high purity phosphorus oxychloride is one of the main material to produce high purity GOF, it is also a main doping agent of chip manufacturing. Which is widely used to the spread and mix technology in the production of integrated circuit, solar battery and electron component. It is a necessary chemial in the production process of integrated circuit,which is widely used in photovoltaic and IC industry. |
| Packing, Storage and Transportation |
The standard of dry quartz packing bottle includes: 500ml/bottle,600ml/bottle, 1000ml/bottle,1500ml/bottle. And there is a wooden frame outside it. There is Pearl sponge between bottles and frame. There should be outstanding sign of 'poison' and 'corrosive'
on packing. It belongs to level one inorganic acid corrosion items, the IMDG Code is GB 8.1 series 81040. It should be stored in cool, ventilate and dry storeroom. The container must be seeled up, away from heat and fire. It cannot be stored and transported together with
combustible products and deliquescence items. It must be prevented from rain ann sun when transported. If it is transported in box wagon, there should be some measures that prevent rain and snow. And it should be transported according to the Transportation of Dangerous Goods Code which is announced by the Ministry of Transportation and Ministry of Railways. It must be handle with care, prevent from hit and packing damage. If it is on fire, one can use dry yellow sands, dry-chemical fire extinguisher or carbon dioxide fire extinguisher to
put out the fire, but please do not use water. |
| Quality Standard |
This product is in correspond with the requirements of SEMI-C7, the product specification and index is as follows:
NO. |
Inspection Item |
Technical Index
（Calculated by PPB） |
NO. |
Inspection Item |
Technical Index
（Calculated by PPB） |
6N |
6N |
7N |
6N |
7N |
1 |
Ga,max |
1 |
0.1 |
15 |
Sr,max |
3 |
0.9 |
2 |
Co,max |
16 |
0.8 |
16 |
Hg,max |
5 |
0.1 |
3 |
Mn,max |
20 |
1.2 |
17 |
Fe,max |
20 |
6.2 |
4 |
Ti,max |
3 |
0.9 |
18 |
K,max |
20 |
3.3 |
5 |
Al,max |
30 |
5.8 |
19 |
Mg,max |
10 |
4.5 |
6 |
As,max |
25 |
2.4 |
20 |
Ni,max |
10 |
1.0 |
7 |
Ca,max |
20 |
8.9 |
21 |
Ag,max |
1 |
0.6 |
8 |
Au,max |
1 |
0.2 |
22 |
Bi,max |
8 |
0.1 |
9 |
Cu,max |
14 |
3.5 |
23 |
Zn,max |
2 |
3 |
10 |
Ba,max |
15 |
1.4 |
24 |
Sn,max |
3 |
1.5 |
11 |
Pb,max |
5 |
2.1 |
25 |
Nb,max |
1 |
0.1 |
12 |
Cr,max |
10 |
0.7 |
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Chrominance |
5 |
5 |
13 |
Li,max |
6 |
1.4 |
Particle |
≥0.3μm
50max |
≥0.3μm
50max |
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