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Targeted Value (GB12022-89)
Test Result SH6
Tex
Purity ( SF6) (m/m) %
≥99.8
≥99.99
 
Air (m/m)%
≤0.05
≤ 0.002
  
(SF4) %(m/m)
≤0.05
≤ 0.03
  
Water content (m/m) ppm
≤8
≤.15
  
Hydrolizable fluoride (base on HF) ppm (m/m)
≤1.0
≤0.2
  
Acidity (base on HF) ppm (m/m)
≤0.3
≤0.05
  
Mineral oil/ppm(m/m)
≤10
2.2
  
Toxicity
intoxic in biological test
intoxic in biological test
  

 
 
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