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Trichlorosilane(TCS) |
Molecular Formula: SiHCL3
Molecular Weight: 135.44 |
Properties: |
It is colorless transparent liquid with strong irritating odor; volatile. It is soluble in benzene and ether. |
Use: |
It is used for the synthesis of organosilane and chlorosilane; also used as raw material for semiconductor silicon and polysilicon. |
| Spec.: |
Item |
Details |
Best quality |
First quality |
Qualifier |
Trichlorosilane |
99.5 |
99 |
98.5 |
Dichlorosilane |
0.2 |
0.3 |
0.5 |
Silicon tetrachloride |
0.25 |
0.5 |
0.7 |
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Packing & Storage: |
In tank car; stored in cool, dry and draughty place. Temp.: 25℃ max., relative humidity: 75% max. It should be closed tightly; protect against dampness; no mixing with oxidants, acids, alkali. |
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