Chemical Name |
CAS No. |
| Silane Intermediate | |
| Trichlorosilane | 10025-78-2 |
| Tetrachlorosilane | 10026-04-7 |
| n-Propyltrichlorosilane | 141-57-1 |
| 3-Chloropropyltriethoxysilane | 5089-70-3 |
| 3-Chloropropyltrimethoxysilane | 2530-87-2 |
| 3-Chloropropylmethyldimethoxysilane | 18171-19-2 |
| 3-Chloropropylmethyldiethoxysilane | 13501-76-3 |