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| 电子级氢氟酸质量指标 |
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项 目 |
指标 |
EL级 |
UP级 |
UP-S级 |
UP-SS级 |
总酸度(以HF计)/% |
49±0.5 |
49±0.5 |
49±0.2 |
49±0.2 |
色度/Hazen,≤ |
10 |
10 |
10 |
10 |
氟硅酸(H2SiF6)/ (ppm),≤ |
50 |
50 |
10 |
10 |
氯化物(以Cl计)/ppb,≤ |
5000 |
5000 |
200 |
5 |
硝酸盐(以NO3计)/ppb,≤ |
3000 |
3000 |
100 |
5 |
磷酸盐(以PO4计)/ppb,≤ |
1000 |
1000 |
100 |
5 |
硫酸盐(以SO4计)/ppb,≤ |
5000 |
5000 |
200 |
10 |
锂(Li)/ppb,≤ |
20 |
10 |
1 |
0.1 |
钠(Na)/ppb,≤ |
100 |
10 |
1 |
0.1 |
镁(Mg)/ppb,≤ |
100 |
10 |
1 |
0.1 |
铝(Al)/ppb,≤ |
100 |
10 |
1 |
0.1 |
钾(K)/ppb,≤ |
100 |
10 |
1 |
0.1 |
钙(Ca)/ppb,≤ |
100 |
10 |
1 |
0.1 |
铬(Cr)/ppb,≤ |
20 |
10 |
1 |
0.1 |
锰(Mn)/ppb,≤ |
50 |
10 |
1 |
0.1 |
铁(Fe)/ppb,≤ |
100 |
10 |
1 |
0.1 |
钴(Co)/ppb,≤ |
20 |
10 |
1 |
0.1 |
镍(Ni)/ppb,≤ |
50 |
10 |
1 |
0.1 |
铜(Cu)/ppb,≤ |
20 |
10 |
1 |
0.1 |
锌(Zn)/ppb,≤ |
50 |
10 |
1 |
0.1 |
镓(Ga)/ppb,≤ |
20 |
10 |
1 |
0.1 |
钼(Mo)/ppb,≤ |
100 |
10 |
1 |
0.1 |
银(Ag)/ppb,≤ |
20 |
10 |
1 |
0.1 |
镉(Cd)/ppb,≤ |
50 |
10 |
1 |
0.1 |
锡(Sn)/ppb,≤ |
20 |
10 |
1 |
0.1 |
钡(Ba)/ppb,≤ |
100 |
10 |
1 |
0.1 |
铂(Pt)/ppb,≤ |
100 |
10 |
1 |
0.1 |
金(Au)/ppb,≤ |
20 |
10 |
1 |
0.1 |
铊(TI)/ppb,≤ |
20 |
10 |
1 |
0.1 |
铅(Pb)/ppb,≤ |
50 |
10 |
1 |
0.1 |
锑(Sb)/ppb,≤ |
50 |
10 |
1 |
0.1 |
钛(Ti)/ppb,≤ |
100 |
10 |
1 |
0.1 |
铍(Be)/ppb,≤ |
20 |
10 |
1 |
0.1 |
铋 (Bi)/ppb,≤ |
20 |
10 |
1 |
0.1 |
锗(Ge)/ppb,≤ |
20 |
10 |
1 |
0.1 |
锶(Sr)/ppb,≤ |
20 |
10 |
1 |
0.1 |
矾(V)/ppb,≤ |
20 |
10 |
1 |
0.1 |
硼(B)/ppb,≤ |
10 |
10 |
1 |
0.1 |
砷(As)/ppb,≤ |
40 |
5 |
1 |
0.1 |
颗粒 |
≥1.0μm,≤25个/ml |
≥0.5μm,≤25个/ml |
≥0.5μm,≤5个/ml |
≥0.2μm,≤20个/ml |
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备注：可根据客户需求定制特殊规格产品。 |
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